Prisma E SEM

Elemental information at your fingertips

Live composition-based image coloring for intuitive elemental analysis with optional ChemiSEM Technology and integrated energy-dispersive X-ray spectroscopy (EDS). Speed up your work and obtain the most complete sample information with always-on analysis.

Minimize sample preparation time

Low vacuum and ESEM capability enable charge-free imaging and analysis of nonconductive and/or hydrated specimens.

Excellent analytical capabilities

Excellent analytical capabilitieswith a chamber that allows 3 simultaneous EDS detectors, EDS ports that are 180° opposite, wavelength-dispersive spectroscopy (WDS), coplanar EDS/EBSD and high-quality charge-free EDS and EBSD in low vacuum.

Excellent image quality

Excellent image quality at low kV and low vacuum thanks to flexible vacuum modes, including through-the-lens differential pumping. Simultaneous secondary electron (SE) and backscattered electron (BSE) imaging in every mode of operation.

In-situ study of materials in their natural state

With the Prisma E SEM’s environmental SEM (ESEM) mode, samples can be imaged even if they are hot, dirty, outgassing or wet.

Easy to use

Easy to use, intuitive software with user guidance and undo functionality makes highly effective operation possible for novice users, while enabling experts to do their work faster and with fewer mouse clicks.

Resolution	• 3.0 nm at 30 kV in high vacuum, low vacuum and ESEM • 7.0 nm at 3 kV (BSED, beam decel.)
Standard detectors	ETD, low-vacuum SED (LVD), gaseous SED for ESEM mode (GSED), IR camera
Optional detectors	Thermo Scientific Nav-Cam+ Camera, DBS, DBS-GAD, ESEM-GAD, STEM 3+, WetSTEM, RGB-CLD, EDS, EBSD, WDS, Raman, EBIC, etc.
ChemiSEM Technology (optional)	Live quantitative SEM image coloring is available based on energy-dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps and accurate Noran quantification are included.
Stage bias (beam deceleration, optional)	-4,000 V to +50 V
Low vacuum mode	Up to 2,600 Pa (H2O) or 4,000 Pa (N2)
Stage	5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.
Standard sample holder	Standard multi-sample SEM holder uniquely mounts directly onto the stage, hosts up to 18 standard stubs (⌀ 12 mm), does not require tools to mount a sample
Standard sample holder	• Standard multi-sample SEM holder uniquely mounts directly • onto the stage, hosts up to 18 standard stubs (⌀ 12 mm), does • not require tools to mount a sample
Chamber	340 mm inside width, 12 ports, three simultaneous EDS detectors possible, two at 180°, coplanar EDS/EBSD orthogonal to the tilt axis of the stage
In situ accessories (optional)	• Software controlled -20°C to +60°C Peltier cold stage • Software controlled 1,000°C low vacuum/ESEM heating stage • Software controlled 1,100°C high vacuum heating stage • Software controlled 1,400°C low vacuum/ESEM heating stage • IIntegrated gas injection: up to 2 units (other accessories may limit number of gas injection systems (GIS) available) for beam-induced deposition of the following materials: → Platinum → Tungsten → Carbon • Manipulators • Cryo-stage • Electrical probing / multi-probing stations
Software options	• Thermo Scientific Maps Software for automatic large area acquisition using tiling and stitching; correlative work • Thermo Scientific AutoScript 4 Software; a Python-based application programming interface • Pattern generation software • Thermo Scientific TopoMaps Software for image colorization, image analysis and 3D surface reconstruction