PT Wadya Prima Mulia as the Authorized Distributor for ThermoFisher Scientific in Indonesia, provides Helios 6 HD FIB-SEM
More productive TEM workflows and better TEM data
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Helios 6 HD FIB-SEM
The Helios 6 HD FIB-SEM delivers high volume, high-quality, repeatable TEM samples on a wide variety of semiconductor device types and in a variety of manual and semi-automated workflows, supporting R&D, metrology, and failure analysis applications.
Helios 6 HD FIB-SEM meets semiconductor TEM sample preparation growing need
The Thermo Scientific Helios 6 HD Focused Ion Beam Scanning Electron Microscope (FIB-SEM) is designed to meet the industry need for higher volumes of high-quality TEM data for failure analysis and metrology. This addition to the Thermo Scientific family of industry-standard DualBeam instruments delivers increased sample quality and productivity, which, in turn, deliver better TEM data. Producing higher quality TEM data provides actionable information to maximize manufacturing yields and end-product quality.
TEM sample preparation instrument availability
The Helios 6 HD FIB-SEM maximizes system utilization and reduces operating costs with its new Osprey FIB column. The Osprey FIB column with enhanced automated source and column alignments reduces the need for operator and service technician intervention. Additionally, the new Thermo Scientific EasyLift NanoManipulator extends needle life and reduces needle change time to minimize production interruptions.
TEM sample preparation throughput
The Helios 6 HD FIB-SEM features Thermo Scientific AutoTEM 6 Software, which performs automated alignments and enhances grid management for faster setup. An all-new digital scan engine allows simultaneous SEM imaging and milling, while also providing precise scan rotation and accurate pattern positioning. These hardware and software innovations maximize site-specific sample throughput.
TEM sample quality
Sample success rate and quality are of paramount importance, regardless of the type of sample or the sample complexity. Failure analysis labs are expected to deliver high-quality TEM data from every metrology or defect analysis sample.
The Helios 6 HD FIB-SEM contains a new digital scan engine and FIB-SEM control architecture, which provides manual or semi-automated end-pointing for precise isolation of the feature of interest within the sample. In addition, the new Osprey FIB column provides improved low-kV milling. These features combine to deliver high-quality TEM samples, to help you answer the most challenging analysis questions.
TEM metrology
The Helios 6 HD FIB-SEM generates a high volume of TEM samples in a highly repeatable manner, making it ideally suited for semiconductor TEM reference metrology. The Helios 6 HD FIB-SEM complements the Thermo Scientific Spectra, Talos, and Metrios TEMs, delivering high-efficiency, reliable TEM metrology data.
| Electron source | Schottky thermal field emitter, over 1 year lifetime |
| Ion source | Gallium liquid metal, 1,000 hours |
| Landing Voltage | • 20 V–30 kV SEM • 500 V–30 kV FIB |
| SEM resolution | • Optimal WD 0.6 nm @ 2–15 kV, 0.7 nm @ 1 k V, 1.0 nm @ 500 V • Coincident WD 0.6 nm @ 15 kV, 1.2 nm @ 1 kV |
| FIB resolution coincident WD | • 4.0 nm @ 30 kV using preferred statistical method • 2.5 nm @ 30 kV using selective edge method • 500 nm @ 500 V using preferred statistical method |
| In situ TEM sample liftout | Thermo Scientific EasyLift™ NanoManipulator |
| Stage | • Five-axis, all-Piezo motorized • Auto-QuickFlip Shuttle • Automated loadlock |
| Sample types | Bare or de-packaged die |
| Sample size | 36 mm x 66 mm |
| Application software | AutoTEM 6 TEM Software sample preparation suite |
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